[PN0254] Thermoelectric Vacuum Chuck Equipment
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Aluminum 80 x 80mm chuck with 170 W thermoelectric module
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Liquid heat exchanger (400 W)
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Thermoelectric controller (0.01°C resolution, 0.02°C stability)
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Vacuum center and ring inlets
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Vacuum pump (-250 mm Hg, 7 L/min) and 3-way valve
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Device clamps (set of 4)
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Mounting hardware (includes tubing)
