Materials | 2023
Package Design Thermal Optimization for Metal-Oxide Gas Sensors by Finite Element Modeling and Infra-Red Imaging Characterization performed temperature distribution measurements across the assembly by using an Optotherm thermal imaging system with a long-wave infrared detector. The journal mentioned the system's high-temperature measurement accuracy up to 1 °C and a spatial lateral resolution of 5 µm.
https://www.mdpi.com/1996-1944/16/18/6202
ACS Omega | 2021
Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater
This study presents a simple, low-cost MOS gas sensor fabricated using a planar MEMS process with only two photolithography steps. The temperature distribution of the MHP was measured using an Optotherm Sentris thermal emission microscope. The sensor demonstrated stable performance and high sensitivity, detecting ethanol concentrations as low as 1 ppm at an optimal operating temperature of ~400 °C, making it suitable for portable and commercial gas sensing applications.
https://pubs.acs.org/doi/10.1021/acsomega.0c04340
Nanomaterials | 2020
Tunable Infrared Metamaterial Emitter for Gas Sensing Application
This work presents a tunable on-chip infrared (IR) metamaterial emitter for gas sensing. By integrating a MEMS Peano-shaped microheater with a patterned metamaterial layer, the device achieves efficient, narrow-band, wavelength-selective IR emission. Optotherm Inc's Sentris Thermal Imaging Microscope was used to capture the thermal radiation distribution. The emission wavelength can be tuned through metamaterial design, producing up to 85 µW of radiated power and demonstrating narrow-band emission around 2.44 µm.