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Micro Infrared Microscope
System Components
In addition to the
OptoTherm infrared microscopic camera, Micro includes additional hardware
that is required when characterizing and troubleshooting micro devices. The optical mounting table provides a sturdy platform
with vibration isolation on which to perform sensitive testing. Precise
camera focusing and positioning is accomplished using the vertical focus
stage. Areas of interest on a device can be quickly and accurately
positioned within the camera’s field-of-view using the XY stage. The thermal
stage provides both heating and cooling for precise temperature
control of integrated circuits (ICs) and MEMS devices.

Micro is supplied as a fully tested and
operational system and includes the following components:
°
focusable wide angle lens
Thermalyze image analysis software
Optical mounting table (45 x 45 x 5.6 cm, M6 mounting holes, 10kg)
Vertical focusing stage (17.8 x 10.2 x 48.3cm, 26cm travel, 10µm
micrometer resolution)
XY stage (12 x 12cm platform, 4cm travel, 10µm
micrometer resolution, M6 mounting holes)
Thermal stage with controller (3 x 3in platform, 20 Watt thermoelectric
cooling/heating capacity, #6 mounting holes)
I/O module (8 SPDT 6A@120VAC or 28VDC)
Dell tower PC with LCD multimedia monitor
Camera Link video board (PCI)
Camera Link cable
USB camera communication cable
Camera
power supply (12VDC)
Accessories
Thermalyze Offline Software
Thermalyze Offline
is used to perform post-analysis of data on remote computers and to allow
colleagues to view and analyze data on their own computers. Thermalyze
offline software provides the same image analysis and file saving
capabilities as the full version of Thermalyze. The offline version
however, does not have the ability to capture real-time thermal images from
an InfraSight camera and therefore cannot perform real-time analyses.
High Power Thermal Stage and Controller
The high power stage allows the temperature of devices to be increase and
decreased rapidly. The 4"x4" platform has 70 Watt cooling capacity and
has twelve #6 internal threads for sample mounting. The temperature
setpoint can be manually set via the controller's front panel or
programmatically set through the Thermalyze software. When the high
power stage option is ordered, the vertical focusing stage
Right Angle Camera Bracket
Replaces the standard camera
bracket to orient the camera 90 degrees on the vertical axis. Due to
space constraints, some large device fixtures must be placed left to right
under the camera. If the device is longer in the front to back direction,
the bracket orients the camera's longer field-of-view in the front to back
direction.
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